Oxide Microtubes Fabrication with 10μm to 5μm Pitches and Assembly Characterization
This paper presents design and fabrication process of metallized oxide microtubes at 10μm, 7.5μm and 5μm pitches and assembly at room temperature of the pitch ones. Morphological and electrical characterization have been investigated.
Authors
- P. Stephen Patrick (ORCID: https://orcid.org/0000-0002-7155-1729)
- Frédéric Berger (ORCID: https://orcid.org/0000-0003-3025-6667)
- Michel Olivier
- Raphoz Natacha
- Desbordes Cloé
- Gueugnot Alain
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804673
- Primary Topic
- Advanced Materials and Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00