Structural Investigation of Microchannel and Optical Waveguide Co-integrated Sensor Devices
In this paper, we design a device that integrates a microchannel and optical waveguide core, and fabricate it using the Mosquito method. Then, the light output is detected from the core after transmitting through the microchannel.
Authors
- Takaaki Ishigure (ORCID: https://orcid.org/0000-0001-5155-1740)
- Tomohiro Ichizuka
Institutions
- Keio University (JP)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804665
- Citations
- 1
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.21