Crosstalk Evaluation of Piezoresistive Angle Feedback Sensors in MEMS Electromagnetic Micromirrors
This paper reports crosstalk evaluation of piezoresistive angle feedback sensors in MEMS electromagnetic micromirrors used in LiDAR. It identifies the root causes of crosstalk between the slow and fast axes of the micromirror from electrical and mechanical perspectives, and proposes optimization solutions to reduce crosstalk.
Authors
- Er-Qi Tu
- Junfeng Zhou (ORCID: https://orcid.org/0009-0008-7911-4217)
- Xiao-Yong Fang (ORCID: https://orcid.org/0000-0002-8593-3103)
- Ang Li (ORCID: https://orcid.org/0000-0002-3803-2169)
- Wenming Zhang (ORCID: https://orcid.org/0000-0001-6567-8099)
Institutions
- Shanghai Jiao Tong University (CN)
- State Key Laboratory of Mechanical System and Vibration
Publication Details
- Published
- 2024-11-10
- DOI
- https://doi.org/10.1109/ipc60965.2024.10799586
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China