High-Q microring resonator on hybrid Si<sub>3</sub>N<sub>4</sub>/ScAlN platform
A high-Q microring resonator based on a hybrid structure of ScAlN integrated with Si<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> is reported with intrinsic Q-factor up to 1.4 × 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup>.
Authors
- Stéphane Kéna‐Cohen (ORCID: https://orcid.org/0000-0001-5065-2750)
- Youting Wu (ORCID: https://orcid.org/0000-0003-4449-1561)
- Moe Soltani
- Zetian Mi (ORCID: https://orcid.org/0000-0001-9494-7390)
- Zheshen Zhang (ORCID: https://orcid.org/0000-0002-8668-8162)
- Pierre-Luc Thériault (ORCID: https://orcid.org/0009-0007-3610-517X)
- Jiangnan Liu (ORCID: https://orcid.org/0000-0002-1763-7302)
- Mack Kira
- Abdur-Raheem Al-Hallak
- Shuai Liu (ORCID: https://orcid.org/0000-0002-5292-4673)
Institutions
- RTX (United States) (US)
- University of Michigan (US)
Publication Details
- Published
- 2024-11-10
- DOI
- https://doi.org/10.1109/ipc60965.2024.10799800
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Science Foundation