Single wavelength 2D beam steering using an Optical Phased Array on a MEMS cantilever
We demonstrate the integration of a photonic circuit containing passive and active components into a piezoelectric-actuated micro cantilever. A 16-channel optical phased array operating at a wavelength of 905nm provides beam scanning over a range of 17° in one dimension, while the inclination of the entire circuit and consequently the angle of the output beam in a second dimension can be independently modified over a range of up to 40° via the piezoelectric actuator.
Authors
- Daivid Fowler (ORCID: https://orcid.org/0000-0003-4576-5819)
- G. Le Rhun (ORCID: https://orcid.org/0000-0002-4373-0041)
- C. Dieppedale (ORCID: https://orcid.org/0000-0003-3373-1494)
- L. Mollard (ORCID: https://orcid.org/0000-0002-1593-4709)
- Jonathan Faugier-Tovar (ORCID: https://orcid.org/0000-0001-5034-3747)
- Sylvain Guerber (ORCID: https://orcid.org/0000-0002-6714-4610)
- Antoine Hamelin
- Kim Abdul-Karime
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2024-11-10
- DOI
- https://doi.org/10.1109/ipc60965.2024.10799832
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00