A 5 μm Pitch VGA Resolution GeSi Lock-in Pixel Array in Backside Illumination Configuration
We demonstrate a 5 μm pitch VGA resolution GeSi lock-in pixel array in backside illumination (BSI) configuration for indirect time-of-flight (iTOF) applications. Our work paves the route to low-cost SWIR 2D/3D imagers with CMOS compatible process and possible adoption of SWIR eye-safe lasers.
Authors
- Y.-H. Liu
- Neil Na (ORCID: https://orcid.org/0000-0003-2553-3324)
- C.-L. Chen
- Ting-Ting Wu (ORCID: https://orcid.org/0000-0002-1835-1955)
- Ya‐Hui Lin (ORCID: https://orcid.org/0000-0001-9130-5149)
- Chih‐Che Lin (ORCID: https://orcid.org/0000-0002-3708-5402)
- S.-L. Chen
- Chongbin Liang
- Cheng‐Yi Chen (ORCID: https://orcid.org/0000-0003-2739-1921)
- Yaling Lu (ORCID: https://orcid.org/0000-0002-8415-9849)
Publication Details
- Published
- 2024-11-10
- DOI
- https://doi.org/10.1109/ipc60965.2024.10799703
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00