Integration of Barium Titanate Thin Films in Silicon Photonics for Electro-Optic Modulation
An integration pathway for fully in-house developed barium titanate BaTiO3 nanophotonic Pockels modulator via chemical solution deposition is presented. The barium titanate thin film exhibits a very high Pockels coefficient and device operation is shown on a silicon ring resonator.
Authors
- Koen De Geest
- Dries Van Thourhout (ORCID: https://orcid.org/0000-0003-0111-431X)
- Jeroen Beeckman (ORCID: https://orcid.org/0000-0002-0711-2465)
- Klaartje De Buysser (ORCID: https://orcid.org/0000-0001-7462-2484)
- Peter Bienstman (ORCID: https://orcid.org/0000-0001-6259-464X)
- Ewout Picavet (ORCID: https://orcid.org/0000-0001-8196-2807)
- Enes Lievens (ORCID: https://orcid.org/0009-0001-9867-4665)
Institutions
- Ghent University (BE)
Publication Details
- Published
- 2024-11-10
- DOI
- https://doi.org/10.1109/ipc60965.2024.10799854
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00