On‐Chip Thermoelectric Devices Based on Standard Silicon Processing (Small 51/2024)
Thermoelectric Devices In article number 2405411, Elisabetta Dimaggio, and co-workers present an on-chip thermoelectric generator for efficient heat-to-electricity conversion. This thermoelectric device is based on hundreds of interconnected, tall, thin silicon nanobeams, which guarantee a reduced thermal conductivity. The design and the standard IC fabrication process allow to achieve high mechanical stability and high-power density.
Authors
- Giovanni Pennelli (ORCID: https://orcid.org/0000-0002-2774-3600)
- L. Fonseca (ORCID: https://orcid.org/0000-0002-1394-8074)
- Elisabetta Dimaggio (ORCID: https://orcid.org/0000-0002-7596-8839)
- Antonella Masci (ORCID: https://orcid.org/0009-0008-9493-0562)
- Marc Salleras (ORCID: https://orcid.org/0000-0001-8812-8268)
- Amedeo De Seta
Institutions
- University of Pisa (IT)
- Institut de Microelectrònica de Barcelona (ES)
Publication Details
- Journal
- Small
- Published
- 2024-12-01
- DOI
- https://doi.org/10.1002/smll.202470383
- Citations
- 1
- Primary Topic
- Advanced Thermoelectric Materials and Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.12