A Novel 2-DOF Frame-Type Rotary Piezoelectric Actuator: Design, Dynamic Modeling, and Experimental Evaluation

Traditional multi-degree-of-freedom actuators suffer from low manipulation accuracy, poor electromagnetic compatibility, and considerable system complexity, due to their structure, operating principle, and transmission limitations. To address these issues, a novel two-degree-of-freedom rotary piezoelectric actuator with a frame stator is proposed, which utilizes the principle of modal coupling to form an elliptical trajectory for actuation. The key dimensions of the frame stator are optimized to enhance the output performance by creating its dynamic model. The experimental results indicate that the actuator prototype achieves a start/stop response time of less than 20 ms in both <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</i>- and <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">y</i>-axis directions, with angular displacement resolutions of 7.2 μrad and 7.4 μrad, respectively, highlighting its rapid response and high positioning accuracy. Ultimately, the feasibility of the potential application of the prototype is verified through load experiments, which provides a new approach for advancing optical pointing mechanisms.