Sensing application of double rectangular root and ring nanocavs in MIM waveguides

Optical sensor is a kind of sensor based on optical principle, which has the advantages of high precision, non-contact, high sensitivity, no electromagnetic interference, high reliability, multi-functionality and so on. They can be applied to scientific research, industrial manufacturing, medical diagnosis, environmental monitoring and other fields to achieve high precision measurement and detection of temperature, pressure, flow, displacement, deformation and other physical quantities. They have a wide range of applications in nanophotonics because they can manipulate light fields at the microscopic scale and have the ability to be highly localized and enhance induction. These properties make Surface Plasmon an important component in the development of new optoelectronic devices, sensors and optical storage devices. In this paper, a nanosensor structure consisting of a double rectangular MIM waveguide and a ring cavity is proposed. The sensor characteristics are simulated and analyzed by finite element method. In addition, we continue to optimize the sensing performance of the structure. The maximum sensitivity was 2580nm/RIU and the dominant value was 58. This structure has a good application prospect in temperature detection sensor.