Development of Electrical Variable Capacitor Using Fast Recovery Diodes for Semiconductor Manufacturer System

This paper proposes a new electrical variable capacitor (EVC) circuit that uses fast recovery diodes. The proposed circuit addresses the shortcomings of conventional EVC circuits, such as the use of PiN diodes and the high voltage stress on semiconductor components, leading to significant cost reductions. The effectiveness of the proposed EVC circuit is verified through experiments conducted at an RF power frequency of 13.56 MHz and an RF power of 1.8 kW.