Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μ m spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment. • Grazing emission XRF measurements do not require geometric factor correction. • Strip detector successfully implemented for the grazing emission XRF measurement. • The same fitting procedure applied for grazing incidence and grazing exit geometries. • Complex thin film waveguide structure reconstructed with sub-nm depth resolution.