Structure and Magnetic Properties of Multilayer Nanosystems Based on Thin Films of Cobalt and Chromium-Group Metals Deposited by Magnetron Sputtering

In cobalt-based thin-film nanostructures with chromium-group metal buffer layers, formed by magnetron sputtering, features of the conductivity of buffer layers of varying thicknesses and magneto-optical response of cobalt films on tungsten are identified. Analysis of electron-microscopy data, X-ray phase analysis, and magneto-optical measurements reveals specific structure and properties of tungsten films. The resistance of these films depends on their thickness and is determined by charge transfer between crystallites. The tungsten/cobalt layer nanostructures do not exhibit magnetic anisotropy.

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Journal
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
Published
2024-10-01
DOI
https://doi.org/10.1134/s1027451024701015
Primary Topic
Copper Interconnects and Reliability
Type
article
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article

Structure and Magnetic Properties of Multilayer Nanosystems Based on Thin Films of Cobalt and Chromium-Group Metals Deposited by Magnetron Sputtering

V. А. Paporkov, R. V. Selyukov, А. В. Проказников, О. V. Savenko et al.
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
Copper Interconnects and Reliability
article

Structure and Magnetic Properties of Multilayer Nanosystems Based on Thin Films of Cobalt and Chromium-Group Metals Deposited by Magnetron Sputtering

V. А. Paporkov, R. V. Selyukov, А. В. Проказников, О. V. Savenko, S. V. Vasilev
article en

Abstract

In cobalt-based thin-film nanostructures with chromium-group metal buffer layers, formed by magnetron sputtering, features of the conductivity of buffer layers of varying thicknesses and magneto-optical response of cobalt films on tungsten are identified. Analysis of electron-microscopy data, X-ray phase analysis, and magneto-optical measurements reveals specific structure and properties of tungsten films. The resistance of these films depends on their thickness and is determined by charge transfer between crystallites. The tungsten/cobalt layer nanostructures do not exhibit magnetic anisotropy.

Journal of Surface Investigation X-ray Synchrotron and Neutron TechniquesVol. 18(5)
Yaroslavl State University (RU), Institute of Physics and Technology (RU)
Openalex Percentile: Top 86%
Copper Interconnects and Reliability
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Structure and Magnetic Properties of Multilayer Nanosystems Based on Thin Films of Cobalt and Chromium-Group Metals Deposited by Magnetron Sputtering — V. А. Paporkov, R. V. Selyukov, et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques (2024) | TGRS Research Map | TGRS