Estimation of Internal Charging Potentials of Dielectrics Coated with a Conductive Film

The charging potentials of quartz glass coated with a conductive metal film were estimated. Estimations were made based on the measured dependence of the intensity of the cathodoluminescent signal on the energy of the incident electron beam. Calculations showed that when quartz glass coated with a 14 nm thick Au film is irradiated, the charging potential can reach 1.7 kV at an electron energy of 10 keV and 2.7 kV at 15 keV. An estimation of the electric field generating under the surface of the grounded film demonstrated that the field strength does not exceed 4 × 107 V/cm.