Adaptation multimode COM for Low-Cut TC-SAW device
This paper adapts the multimode Coupling-of-Mode (COM) model for low-cut Temperature Compensated Surface Acoustic Wave (TC-SAW) devices. The study focuses on devices based on -2° YX-cut lithium niobate substrates with Cu electrodes covered by a silicon oxide film. The interactions between the main Shear-Horizontal (SH) mode, the Rayleigh mode, and bulk acoustic waves (BAWs) are analyzed. The adaptation aims to approximate the frequency behavior of multimode COM parameters to enhance model accuracy.
Authors
- Takahiro Sato (ORCID: https://orcid.org/0000-0003-2202-0910)
- Haekwan Oh
- A. A. Shimko (ORCID: https://orcid.org/0000-0002-2084-8020)
Publication Details
- Published
- 2024-09-22
- DOI
- https://doi.org/10.1109/uffc-js60046.2024.10793712
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00