Adaptation multimode COM for Low-Cut TC-SAW device

This paper adapts the multimode Coupling-of-Mode (COM) model for low-cut Temperature Compensated Surface Acoustic Wave (TC-SAW) devices. The study focuses on devices based on -2° YX-cut lithium niobate substrates with Cu electrodes covered by a silicon oxide film. The interactions between the main Shear-Horizontal (SH) mode, the Rayleigh mode, and bulk acoustic waves (BAWs) are analyzed. The adaptation aims to approximate the frequency behavior of multimode COM parameters to enhance model accuracy.

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Publication Details

Published
2024-09-22
DOI
https://doi.org/10.1109/uffc-js60046.2024.10793712
Primary Topic
Acoustic Wave Resonator Technologies
Type
article
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article

Adaptation multimode COM for Low-Cut TC-SAW device

Takahiro Sato, Haekwan Oh, A. A. Shimko
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Acoustic Wave Resonator Technologies
article

Adaptation multimode COM for Low-Cut TC-SAW device

Takahiro Sato, Haekwan Oh, A. A. Shimko
article en

Abstract

This paper adapts the multimode Coupling-of-Mode (COM) model for low-cut Temperature Compensated Surface Acoustic Wave (TC-SAW) devices. The study focuses on devices based on -2° YX-cut lithium niobate substrates with Cu electrodes covered by a silicon oxide film. The interactions between the main Shear-Horizontal (SH) mode, the Rayleigh mode, and bulk acoustic waves (BAWs) are analyzed. The adaptation aims to approximate the frequency behavior of multimode COM parameters to enhance model accuracy.

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Acoustic Wave Resonator Technologies
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Adaptation multimode COM for Low-Cut TC-SAW device — Takahiro Sato, Haekwan Oh, et al. · (2024) | TGRS Research Map | TGRS