Advanced Design of Capacitive Micromachined Ultrasonic Transducers with Ultra-Low Quality Factor

in this work, we present the design and fabrication of a capacitive micromachined ultrasonic transducer optimized for medical imaging applications. Leveraging the squeeze film damping effect, we achieved a quality factor of approximately 2, which addresses the common challenge of high Q leading to blurred images in high-frequency sensors. Our design minimizes array side lobes and interference, resulting in a sharper array main lobe and reduced image artifacts. By utilizing the PolyMUMPS standard fabrication process, we ensure consistent sensor performance, contributing to more reliable and precise imaging.