Error of Uncertainty Propagation for Material Properties of MEMs resonator extracted by AI-assisted technique

Emergence of new piezoelectric materials warrants a need for a quick and accurate way to characterize their material properties. While artificial intelligence has shown great potential to be able to quickly extract material properties, there is a lack of uncertainty quantification of the extracted material properties which call their accuracy into question. This paper develops a systematic way to estimate the uncertainties of the extracted material properties and improves on the existing infrastructure used to extract the properties, thereby demonstrating high accuracy in the extracted material properties.