Modeling and Simulation of a Piezoelectric-Capacitive Hybrid Micromachined Ultrasonic Transducer
This paper proposes a piezoelectric-capacitive hybrid micromachined ultrasonic transducer (HMUT). The operation mode of HMUT integrates piezoelectric torque and electrostatic forces on the vibration membrane. Modeling through finite element method, the coupling of piezoelectric effects, electromechanical forces, and acoustic-structure interactions are investigated. The results indicate that HMUT surpasses PMUT and CMUT in both transmission and reception sensitivity. Notably, the PZT-HMUT exhibits transmission sensitivity more than nine times higher than that of PMUT/CMUT, and its round-trip sensitivity exceeds six times that of PMUT/CMUT.
Authors
- Junyan Ren (ORCID: https://orcid.org/0000-0002-7799-6251)
- Jia Zhou (ORCID: https://orcid.org/0000-0002-9098-5661)
- Leming He (ORCID: https://orcid.org/0000-0003-4131-3508)
- Wei-Jiang Xü (ORCID: https://orcid.org/0000-0002-7309-2343)
- Ning Lv (ORCID: https://orcid.org/0000-0003-3865-6585)
- Yan Wang (ORCID: https://orcid.org/0000-0002-7834-7499)
Institutions
- Centre National de la Recherche Scientifique (FR)
- Fudan University (CN)
- Soochow University (CN)
- Shanghai Fudan Microelectronics (China) (CN)
- State Key Laboratory of ASIC and System
- Université Polytechnique Hauts-de-France (FR)
Publication Details
- Published
- 2024-09-22
- DOI
- https://doi.org/10.1109/uffc-js60046.2024.10793600
- Citations
- 2
- Primary Topic
- Ultrasound Imaging and Elastography
- Type
- article
- Field-Weighted Citation Impact
- 0.81
Funders
- National Science Foundation
- National Natural Science Foundation of China