Study of surface acoustic wave sensor sensitivity using bonded structure of piezoelectric crystals

It is important to realize high-sensitive surface acoustic wave (SAW) sensor. Previous researches indicate that the sensor sensitivity depends on a piezoelectric crystal used. Therefore, it is necessary to select the most suitable piezoelectric crystal for the application. Is it possible to realize a SAW sensor that can detect both mechanical and electrical perturbations with high sensitivity? In this paper, we focus on SH-SAWs propagating through a bonded structure of piezoelectric crystals. Using finite element analysis, we calculated the sensor sensitivity of SH-SAWs propagating through junction structures or single crystals. As a result, we found that a sensor with high sensitivity to mechanical and electrical perturbations can be realized by using a snow-image structure.