11.6-GHz SV-SAW Resonator Based on Y128° LiNbO₃/SiO₂/Si Substrate

This work proposes a novel design to excite shear vertical surface acoustic waves (SV-SAW) to achieve high-frequency resonators operating above 10 GHz. High-frequency SV-SAW resonators were designed, fabricated and tested. As a proof of concept, the demonstrated two SV-SAW resonators show excellent performance: k<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> of 8%, Bode-Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</inf> of 616, and figure of merit (FoM) of 49 for the 9.45 GHz resonator; k<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> of 9.97%, Bode-Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</inf> of 271, and FoM of 27 for the 11.67 GHz resonator with IDT wavelength of 240 nm. These results exhibit the highest FoM compared to other reported SAW resonators operating in the 9 to 14 GHz range.