A MEMS Phase Comparator Using Three Air Coupled Triangular MEMS Resonators

In this paper the experimental validation of the performances of a piezoelectric resonant phase comparator is presented, it is made of three air coupled triangluar microelec-tromechanical systems (MEMS) resonator. The operation of this resonant MEMS phase comparator is experimentally validated at a frequency of 210 kHz. The output of the MEMS phase comparator is has an overall sensitivity of 66 uV per degree or 0.58mm/s per degree when the amplitude of the input signal is 5Vpp at a frequency of 210 kHz. This work offers a strong proof of concept towards the development of fully mechanical MEMS phase comparator.