Growth of 33°Y-LiNbO<sub>3</sub> films on high-temperature stable Bragg mirrors for high-frequency BAW resonators
Challenges in terms of chemical stability and bottom electrode conductivity must be overcome in the case of LN direct growth on structures used in BAW devices. In this work, three type of Bragg reflectors were studied: (ZnO/Pt)<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</inf>, (Mo/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>)<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</inf>, (Ta<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf>/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>)<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</inf>. Amorphous (SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>/Ta<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf>)<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</inf> mirror showed sufficient thermal stability at LiNbO3 deposition conditions. The solidly mounted resonator based on deposited 160 nm thick 33°Y-LiNbO3 film grown by means of direct liquid injection CVD showed a single mode at 6.96 GHz with electromechanical coupling of 6 %.
Authors
- Marc Clement
- Ausrine Bartasyte (ORCID: https://orcid.org/0000-0002-8862-2669)
- Samuel H. Margueron (ORCID: https://orcid.org/0000-0003-2971-1351)
- F. Sthal (ORCID: https://orcid.org/0000-0002-8846-6109)
- Jean-Manuel Decams (ORCID: https://orcid.org/0000-0002-4032-366X)
- Sondes Boujnah
- Jose Manuel Carmona Cejas
- Quentin Micard (ORCID: https://orcid.org/0000-0003-1977-1721)
- Md. Nahian Al Subri Ivan (ORCID: https://orcid.org/0000-0002-7093-6782)
- Vincent Astié (ORCID: https://orcid.org/0000-0001-6548-178X)
- Lilia Arapan
- Philippe De Visme (ORCID: https://orcid.org/0009-0004-1460-1277)
- M. Micolle
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université Paris-Saclay (FR)
- Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies (FR)
- École Nationale Supérieure de Mécanique et des Microtechniques (FR)
- Universidad Politécnica de Madrid (ES)
Publication Details
- Published
- 2024-09-22
- DOI
- https://doi.org/10.1109/uffc-js60046.2024.10794090
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00