A Force Feedback Controlled Piezoelectric Micromachined Ultrasonic Transducers (PMUT) with Tunable Dynamic Performance

A novel PMUT is presented, which outperforms the state-of-the-art in two aspects 1) a force feedback control loop (FFCL) is integrated, allowing tunable bandwidth performance, 2) An electrically controlled feedback force is used to mimic the geometric and material nonlinearities of the structure to realize the hardening spring effect in small vibration amplitude conditions, which improves the working flexibility and stability of the device. The abovementioned novelties ensure the dynamic tunability of the frequency response of the PMUT, which increases the versatility of the device to meet the requirement of different applications.