Study of Longitudinal Modes Suppression of Resonators on LiNbO<sub>3</sub>/SiO<sub>2</sub>/SiC Substrate
In this work, we illustrate a simple method to suppress the longitudinal modes while the transverse modes suppression is ensured concomitantly. Based on the X-cut LiNbO3/SiO2/SiC (LNOSiC) substrate, methods to suppress transverse modes and longitudinal modes were analyzed by FEM. A set of SH-SAW resonators with various electrode structures, such as apodization electrode, tilted IDT, and piston mode structures were fabricated. The effects of different electrode configurations on the longitudinal modes are compared, with reflectors of reduced pair number. Next, the impact of reducing the number of reflector pairs on the Q factors of the main mode was investigated. Lastly, a filter with flat in-band response and fractional bandwidth (FBW) of 12.4 was also fabricated, in which the shunt resonators employ piston mode structures and only two pairs of reflectors.
Authors
- Kai Huang (ORCID: https://orcid.org/0000-0002-0884-1715)
- Juxing He (ORCID: https://orcid.org/0000-0002-0070-6041)
- Xinjian Ke (ORCID: https://orcid.org/0009-0001-0426-4180)
- Liping Zhang (ORCID: https://orcid.org/0000-0003-3650-4174)
- Jinbo Wu (ORCID: https://orcid.org/0000-0001-6572-768X)
- Xiaoli Fang (ORCID: https://orcid.org/0009-0002-1720-4344)
- Xin Ou (ORCID: https://orcid.org/0000-0002-0316-9958)
- Shibin Zhang (ORCID: https://orcid.org/0000-0001-9928-256X)
- Pengcheng Zheng (ORCID: https://orcid.org/0000-0003-1839-1700)
Institutions
- Chinese Academy of Sciences (CN)
- Shanghai Institute of Microsystem and Information Technology (CN)
Publication Details
- Published
- 2024-09-22
- DOI
- https://doi.org/10.1109/uffc-js60046.2024.10793594
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00