Development of Integrated Measurement System for Local C-V Mapping and Piezoresponse Force Microscopy

In this paper, we propose the integrated measurement of piezoresponse force microscopy (PFM), and the local C-V mapping based on scanning nonlinear dielectric microscopy (SNDM). PFM has an advantage which can easily obtain three-dimensional static domain structure, while the local C-V mapping has ability to realize high-resolution and high-speed observation of dynamic domain switching. These methods are complementary to each other, and by combining them, it is expected that new insights about the characteristics of domain switching are provided that cannot be obtained by a single measurement. In this study, we developed the integrated measurement system of PFM and local C-V mapping, and a randomly oriented yttrium-doped HfO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> was characterized by this method. As a result, we succeeded observation of the same area of PFM and local C-V mapping. In addition, the relationship between PFM image which was obtained by PFM measurement and C-V curves which were obtained by local C-V mapping was reasonable. This measurement method can be a powerful tool for the characterization of domain switching and the elucidation of unexpected phenomena about ferroelectric polarization switching.