Improving ESD Robustness in DBAW Filters via Optimized Release Hole Clearance Design

This paper presents an approach to enhancing electrostatic discharge (ESD) robustness in Double-Side Processed Bulk Acoustic Wave (DBAW) filters. The study focuses on optimizing the clearance between release holes and electrodes to prevent device failure caused by ESD events. DBAW filters are crucial in mobile communications, especially with the growing demand for high-frequency filters in 5G applications. The paper discusses challenges in ESD prevention and proposes a design where the top and bottom electrodes are strategically distanced from the release holes. This layout optimization reduces the likelihood of breakdowns caused by ESD without compromising the performance of the filter. Experimental results demonstrate that this design significantly improves ESD robustness, making it a reliable solution for ensuring the durability of DBAW filters. The findings offer a valuable reference for enhancing the ESD protection of micro-electro-mechanical-system (MEMS) devices.