High-Q Longitudinal Leaky SAW Resonators at > 4 GHz on LiNbO<sub>3</sub>/SiO<sub>2</sub>/SiC Platform
This work demonstrates a high quality factor (Q) longitudinal leaky (LL) mode surface acoustic wave (SAW) resonator using LiNbO3/SiO2/SiC substrate. The fabricated LL-SAW resonator shows a high admittance ratio of 71.5 dB, a large electromechanical coupling $\left( {k_t^2} \right)$ of 21.03% and a high Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</inf> of 935, hence resulting in an excellent figure-of-merit (FOM) of 196.4 at 4.4 GHz. For comparison, the LL-SAW resonator was also fabricated on LiNbO3/SiC substrate, showing a significantly lower Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</inf>, a lower $k_t^2$, and a stronger out-of-band spurious mode.
Authors
- Kai Huang (ORCID: https://orcid.org/0000-0002-0884-1715)
- Juxing He (ORCID: https://orcid.org/0000-0002-0070-6041)
- Xinjian Ke (ORCID: https://orcid.org/0009-0001-0426-4180)
- Mijing Sun (ORCID: https://orcid.org/0000-0001-7422-0143)
- Xiaoli Fang (ORCID: https://orcid.org/0009-0002-1720-4344)
- Xin Ou (ORCID: https://orcid.org/0000-0002-0316-9958)
- Dongchen Sui (ORCID: https://orcid.org/0009-0005-3502-6838)
- Shibin Zhang (ORCID: https://orcid.org/0000-0001-9928-256X)
- Pengcheng Zheng (ORCID: https://orcid.org/0000-0003-1839-1700)
Institutions
- Shanghai Institute of Microsystem and Information Technology (CN)
Publication Details
- Published
- 2024-09-22
- DOI
- https://doi.org/10.1109/uffc-js60046.2024.10794012
- Citations
- 1
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.18