Convex Bimorph PMUT for High Transmission Efficiency

A convex bimorph PMUT, with a piezoelectric layer deposited on a silicon-based layer, was proposed. PZFlex simulation showed a voltage-to-pressure efficiency high enough for tissue harmonic imaging even at a relatively low drive voltage. The bandwidth was in an allowable range when nonlinear propagation was considered. Its combination with a highly sensitive CMUT receiving element is expected.