Optomechanical Cavities Based on Epitaxial GaP on Nominally (001)‐Oriented Si (Adv. Mater. Technol. 24/2024)
Cavity Optomechanics In article number 2400525, Víctor J. Gómez and co-workers present the process of fabrication of a GaP optomechanical epitaxially grown on exact (001)-Si following a novel two-step dry-etching process. This suggests a simple and lowcost way to build GaP-based photonic devices directly integrated on Si(001) photonic wafers.
Authors
- Víctor J. Gómez (ORCID: https://orcid.org/0000-0003-2364-8814)
- Basilio Javier García (ORCID: https://orcid.org/0000-0002-6711-2352)
- Karim Ben Saddik (ORCID: https://orcid.org/0000-0003-0060-5651)
- Miguel Sinusía Lozano (ORCID: https://orcid.org/0000-0002-1744-4148)
- Alejandro Martı́nez (ORCID: https://orcid.org/0000-0001-5448-0140)
- Sergio Fernández‐Garrido (ORCID: https://orcid.org/0000-0002-1246-6073)
- Enrique Barrigón (ORCID: https://orcid.org/0000-0001-6755-1841)
- Amadeu Griol
- Paula Mouriño (ORCID: https://orcid.org/0009-0003-6511-1246)
- Laura Mercadé (ORCID: https://orcid.org/0000-0002-4994-7727)
- Raquel Resta (ORCID: https://orcid.org/0009-0007-8657-0782)
Institutions
- Universitat Politècnica de València (ES)
- Universidad Autónoma de Madrid (ES)
- Universidad de Málaga (ES)
Publication Details
- Journal
- Advanced Materials Technologies
- Published
- 2024-12-01
- DOI
- https://doi.org/10.1002/admt.202470112
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00