Electronically driven THz spatial light modulator working in transmission mode

The terahertz spatial light modulator (THz SLM) is a crucial device for the dynamic modulation of terahertz waves. It is beneficial in the fields of THz imaging and photonic computing. For example, we could encode and perform compressive sensing using THz SLMs. Compared with THz SLMs working in the reflective mode, the transmission mode THz SLMs (T-THz SLMs) show an obvious advantage in insertion loss. Due to the ultra-low insertion loss, several T-SLMs could be used in series, greatly facilitating its application of optical computing. In this study, we designed an electrically driven T-THz SLM, which the MEMS approach could fabricate. To enhance the performance of the T-THz SLM, the T-THz SLM was designed to be prepared for freestanding ultra-thin silicon nitride windows. Owing to the merits of ultra-low thermal capacitance and high transmission of the devices, a high-speed, low-power-consumption, low-insertion-loss, broadband T-THz SLM would be realized.