High-precision measurement technology for microdisplacement of optical components in vibration environment

In order to realize the measurement of the micro relative displacement of the optical components in the vibration environment, first of all, the vibration type of the electro-optical pod was analyzed. The relative micro displacement between the mirror and the frame in the vibration environment was simulated, especially the primary mirror component, which affects the imaging of the optical system by the reflector components. Then, a set of micro displacement measurement devices is designed to make it possible for measuring micro displacement in vibration environment with high precision. The relative displacement of the mirror and the frame in the primary component of an optical system is measured by the devices, the experimental measurement results are consistent with the simulation results. The high-precision measurement of the micro displacement of the optical components in the vibration environment is realized, which proves the effectiveness and correctness of the measurement devices and the method. On the basis of the accurate measurement of micro displacement, measurements to reduce the relative displacement between the mirror and the frame in the vibration environment are proposed, which provides an optimization direction for the improvement of the imaging quality of the optical system.