Design of high-efficiency and broadband SiN-on-SOI grating couplers based on CUMEC’s process platform
Silicon nitride-on-SOI grating couplers are specifically designed for the O- and C-bands, utilizing CUMEC's advanced process platform. Through simulation, we have achieved an impressive maximum coupling efficiency of -1.4 dB and -1.8 dB to standard single-mode fiber for the O- and C-bands respectively, accompanied by a remarkable 1-dB bandwidth of 70 nm and 78 nm. Furthermore, we have conducted an analysis on fabrication variation tolerance.
Authors
- Sizhu Shao (ORCID: https://orcid.org/0000-0002-1010-4941)
- Hanmeng Li
- Wenhao Zhai (ORCID: https://orcid.org/0000-0003-1956-6402)
- Zhixiong Xiao (ORCID: https://orcid.org/0000-0002-5673-6805)
- Junbo Feng
Publication Details
- Published
- 2024-12-13
- DOI
- https://doi.org/10.1117/12.3046706
- Citations
- 1
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.21