Dual‐Channel Electrostatically Actuated MEMS Fabry–Perot Filtering Module for Near‐Infrared Spectroscopic Detection

Abstract MEMS‐based Fabry–Perot filter components (MEMS‐FPC) have garnered significant attention in the field of micro‐spectrometers due to their ability to perform high‐efficiency spectral analysis at the microscale. However, achieving optimal peak transmission performance across a broad spectral range remains a core challenge in the development of MEMS‐FPC modules. In this work, a novel dual‐channel is presented, electrostatically actuated NIR MEMS‐FPC filter module that overcomes the limitations of electrostatic tuning in spectral detection through the integration of an innovative tuning structure and dual‐channel filtering. Fabricated using wafer‐level bulk micromachining techniques, the module enables continuous tuning and precise detection under a driving voltage of 0–40 V. The two channels cover spectral ranges of 814–946 nm and 968–1211 nm, respectively, achieving peak transmittance over 79% with full‐width at half maximum (FWHM) values ranging from 7.59 to 43.29 nm, setting a new standard for performance in this spectral range. The results demonstrate the potential of MEMS‐FPC as a high‐performance spectral sensor, demonstrating its future application as a NIR microspectrometer when integrated with commercial CCDs. With its low power consumption and compact size, this module is well‐suited for integration into portable devices such as smartphones and drones, offering real‐time NIR spectral sensing capabilities.