X-ray Diffraction by Surface Acoustic Waves at the Laboratory X-ray Source
Abstract X-ray diffraction by surface acoustic waves is investigated by the method of triple-crystal X-ray diffractometer on the laboratory source of X-ray radiation. This approach allows to determine the amplitudes of the surface acoustic waves (SAW) and to study the features of the diffraction process for different materials, to study the characteristics of fabrication of the structures of the interdigital transducers (IDT) for SAW excitation. The influence of the metallization coefficient of the IDT on the SAW excitation process is considered.
Authors
- D. V. Irzhak (ORCID: https://orcid.org/0000-0002-3289-9845)
- Д. В. Рощупкин (ORCID: https://orcid.org/0000-0001-9955-5222)
- Kirill Pundikov (ORCID: https://orcid.org/0009-0005-4036-3740)
Institutions
- Institute of Microelectronics Technology and High Purity Materials (RU)
Publication Details
- Journal
- Journal of Physics Conference Series
- Published
- 2024-12-01
- DOI
- https://doi.org/10.1088/1742-6596/2924/1/012018
- Primary Topic
- Ultrasonics and Acoustic Wave Propagation
- Type
- article
- Field-Weighted Citation Impact
- 0.00