A 3 nm-FinFET 4.3 GHz 21.1 Mb/mm ² Double-Pumping 1-Read and 1-Write Psuedo-2-Port SRAM With a Folded Bitline Multi-Bank Architecture

A double-pumped 1-read and 1-write pseudo-2-port 6T static random access memory (SRAM) with folded bitline (BL) multi-bank (MB) architecture is demonstrated on 3 nm FinFET technology. A new self-timed clock generator is proposed to optimize wordline (WL) negating with shortcut path circuit (WLNS). sense-amplifier-enable interlocking (SAEI) circuit and the clock generator can provide a 3.6% increase in the maximum operating frequency (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{\text {MAX}}$ </tex-math></inline-formula>) by minimizing the tail period of the read operation. The data pre-loading write driver (PLWD) circuit facilitates a shorter separation time between read and write operations by overlapping BL pre-charge and write data loading on the BL, thereby leading to a 4.4% improvement in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{\text {MAX}}$ </tex-math></inline-formula>. The WLNS and PLWD contribute to 2.4% <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{\text {MAX}}$ </tex-math></inline-formula> gain by promoting contention-free features between the BL pre-charge and write driver circuits. Furthermore, the real-time dynamic performance scaling (RTDPS) feature ensures a robust SRAM read/write operation across the entire supply voltage range by optimizing WL pulsewidth. The test chip measurement results show that it achieves a 5.9% increase in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{\text {MAX}}$ </tex-math></inline-formula> at high voltage ranges. In addition, the memory density is 21.1 Mb/mm2, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$f_{\text {MAX}}$ </tex-math></inline-formula> is 4.3 GHz, resulting in a figure of merit (FoM) of 90.7 GHz <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> Mb/mm2/V.