Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance

TiZrMoC coatings were deposited on Si(100) substrates using a DC dual magnetron sputtering. The composition was controlled by adjusting the sputtering parameters of the TiZrMo and graphite targets. The influence of graphite target current on the resulting coating properties was explored. TEM analysis revealed a single-phase structure with Ti/Mo/Zr substitutional elements, columnar grains, and a strong [111] texture. Nanotwins and stacking faults were prevalent within the nanocrystals. EDX, SIMS, XRD, and XPS analyses confirmed the elemental composition and nanostructure. Computational modeling was employed to investigate the mixing behavior of the quaternary solid solutions depending on the valency electron concentration. The films exhibited exceptional mechanical properties, including a maximum hardness of 35 GPa and a wear rate of 2.11 × 10<sup>-7</sup> mm<sup>3</sup>N<sup>-1</sup>m<sup>-1</sup>, attributed to the presence of an amorphous carbon layer and optimized deposition parameters. These findings demonstrate the potential of TiZrMoC coatings for advanced applications requiring exceptional wear resistance and durability.

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Publication Details

Journal
Nanomaterials
Published
2024-12-11
DOI
https://doi.org/10.3390/nano14241986
Citations
11
Primary Topic
Metal and Thin Film Mechanics
Type
article
Field-Weighted Citation Impact
2.96

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article

Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance

Mária Čaplovičová, Marek Opielak, A.D. Pogrebnjak, Piotr Budzyński et al.
11 citations
Nanomaterials
Metal and Thin Film Mechanics
2.96
article

Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance

Mária Čaplovičová, Marek Opielak, A.D. Pogrebnjak, Piotr Budzyński, P. Konarski, A. A. Onoprienko, P. L. Skrynskyy, Svitlana Borba-Pogrebnjak, Olga Maksakova, Vasiliy Pelenovich, Dominik Flock, Miroslav Sahul, Mariusz Kamiński, В. И. Иващенко, Alexander Goncharov, Yang Bing, Volodymyr Buranych
article en
11 citations

Abstract

TiZrMoC coatings were deposited on Si(100) substrates using a DC dual magnetron sputtering. The composition was controlled by adjusting the sputtering parameters of the TiZrMo and graphite targets. The influence of graphite target current on the resulting coating properties was explored. TEM analysis revealed a single-phase structure with Ti/Mo/Zr substitutional elements, columnar grains, and a strong [111] texture. Nanotwins and stacking faults were prevalent within the nanocrystals. EDX, SIMS, XRD, and XPS analyses confirmed the elemental composition and nanostructure. Computational modeling was employed to investigate the mixing behavior of the quaternary solid solutions depending on the valency electron concentration. The films exhibited exceptional mechanical properties, including a maximum hardness of 35 GPa and a wear rate of 2.11 × 10<sup>-7</sup> mm<sup>3</sup>N<sup>-1</sup>m<sup>-1</sup>, attributed to the presence of an amorphous carbon layer and optimized deposition parameters. These findings demonstrate the potential of TiZrMoC coatings for advanced applications requiring exceptional wear resistance and durability.

NanomaterialsVol. 14(24)
Slovak University of Technology in Bratislava (SK), Technische Universität Ilmenau (DE), Sumy State University (UA), University of Economics and Innovation (PL), Wuhan University (CN), Frantsevich Institute for Problems in Materials Science (UA), Łukasiewicz Research Network - Tele and Radio Research Institute (PL), Kirchhoff (Germany) (DE), Łukasiewicz Research Network (PL), Lublin University of Technology (PL)
Ministerstvo školstva, vedy, výskumu a športu Slovenskej republiky, Wuhan University
Openalex Percentile: Top 9%
Metal and Thin Film Mechanics
2.96
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