GAOPC improves OPC parameter search efficiency and convergence speed

In this paper, we introduce a cost function driven GAOPC (Genetic Algorithm based Optical Proximity Correction) method for automatic OPC job tuning. Instead of manual review and judgement, the customized cost function is defined in advance to regulate GA convergence direction. Meanwhile, a real time Convergence Check Module is introduced to monitor the running status of GAOPC job. A real product case’s evaluation result shows GAOPC has better performance than baseline with 38% less RMS (worst EP value) and around 82% cycle time reduction. Combined with Convergence Check Module, 31% more cycle time can be saved further.