Fresnel diffraction by rectangle aperture: a non-approximate integral theorem and aperture pattern correction

A non-approximate integral theorem of Fresnel diffraction by rectangle aperture is proposed. The phase term in the Fresnel diffraction integral is retained exactly, the Fresnel obliquity factor is determined by triangle relation, not approximated by paraxial. It’s applied to DUV wavelength similar size of rectangle aperture. The numerical evaluation of diffraction integral provides intensity distribution. The contour profile and fitting rectangle is determined, the alternative phase shift and pattern correction is introduced. The simulation and resolution enhancement of the near field Fresnel diffraction by rectangle aperture, provides a perspective solution of DUV proximity lithography.