A rapid method for fabricating and replicating microlens array structures

Abstract Microlens arrays (MLAs) play a prominent role and are essential components in the fabrication of 3D imaging and optical systems. Traditional MLA patterns have limited applications, which prompts the demand for novel MLA patterns for advanced applications. The fundamental objective of this study is to demonstrate different types of MLA fabrication process within our department, employing custom-developed equipment for industrial applications. The three distinctive MLA patterns that were designed and developed are symmetrical, non-symmetrical and step-layer pattern MLAs. MATLAB and Auto CAD 2D software were used to design the MLA patterns, and they were developed on a 4 inch silicon wafer using maskless exposure lithography and thermal reflow techniques. The fabricated master mold acts as a template for replicating pattern molds on a glass wafer. Photoresist ma-p-1275 G and polydimethylsiloxane resin were used for pattern development on silicon wafer and glass wafer, respectively. The fabricated MLA patterns were characterized with an optical microscope and scanning electron microscopy. The fabricated MLA pattern replicas offer durability, longevity, reusability and scalability for large-scale productions. The current study offers a comprehensive approach to in-house production on different types of MLA pattern fabrications.