Plasma Prize Award Talk: The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

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SPIRE - Sciences Po Institutional REpository
Published
2024-11-03
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Plasma Diagnostics and Applications
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Plasma Prize Award Talk: The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

Rémi Dussart
SPIRE - Sciences Po Institutional REpository
Plasma Diagnostics and Applications
article

Plasma Prize Award Talk: The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago

Rémi Dussart
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Groupe de Recherches sur l'Energétique des Milieux Ionisés (FR)
Openalex Percentile: Top 80%
Plasma Diagnostics and Applications
OpenAlex
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Plasma Prize Award Talk: The Evolution of Cryogenic Etching Plasma Processes Since Their Introduction 35 Years Ago — Rémi Dussart · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS