Atomic Layer Deposition Processes for emerging materials

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Journal
SPIRE - Sciences Po Institutional REpository
Published
2024-10-07
Primary Topic
Semiconductor materials and devices
Type
article
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article

Atomic Layer Deposition Processes for emerging materials

E. Blanquet
SPIRE - Sciences Po Institutional REpository
Semiconductor materials and devices
article

Atomic Layer Deposition Processes for emerging materials

E. Blanquet
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Science et Ingénierie des Matériaux et Procédés (FR)
Openalex Percentile: Top 80%
Semiconductor materials and devices
OpenAlex
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