Shape-Modified Ultrathin Glass Sheet Cantilever for Precise Single Cell Stiffness Measurement

Due to its small size, label-free nature, and excellent compatibility with surrounding instruments, the microcantilever-based sensor is widely used in physical, chemical, and biological measurements. However, traditional microcantilevers face limitations due to complex fabrication methods, intricate operating procedures, or low sensitivity. In this research, we propose a shape-modified, 10 μm ultrathin glass sheet (UTGS)-based cantilever that is highly sensitive (nN/μm) and flexible, integrated with a strain gauge sensor. We present its application in measuring the mechanical properties of single cells. Compared with conventional methods, the proposed UTGS-based cantilever is easier to fabricate, offers superior physical and chemical properties, and demonstrates a high linear correlation between voltage change and applied force or displacement. The cantilever has a sensitivity of 190 nN/μm, making it suitable for measuring the cell stiffness. Additionally, it exhibits excellent optical transparency, enabling real-time observation during measurements, as demonstrated in the stiffness measurement of Dictyostelium cells.