Features of Methods for Modifying Cantilevers for Atomic Force Microscopy

Atomic force microscopy (AFM) is one of the most popular method for surface characterization of solids, composites, polymers, and electronic components used in the road transport complex. The sensitive element of the AFM is a special probe (cantilever). Cantilevers’ improving is the way to expand the AFM efficiency. Different regimes and methods for producing cantilevers with smaller curvature radius are proposed for increasing spatial resolution of AFM. Methods for processing cantilevers to reduce the radius of curvature and increase the resolution are proposed. A method for forming a conductive coating of AFM cantilevers using atomic layer deposition (ALD) has been developed; titanium nitride (TiN) has been selected as the conductive material. Samples of cantilevers with functional coatings based on diamond-like BCx films have been obtained to increase wear resistance. The use of pulsed laser deposition allows one to form a homogeneous diamond-like coating of boron carbide on the probe needle, and also not to affect the back side of the cantilever beam.