Structural and Morphological Analysis of Diamond-Like Carbon Coatings Deposited Using Different Methods

This paper presents a comparative analysis of diamond-like carbon (DLC) coatings deposited by different methods using Raman spectroscopy and atomic force microscopy (AFM). The unique combination of high hardness and chemical resistance in DLC coatings makes them particularly valuable for advanced optoelectronic devices and precision instrumentation, where these properties enhance device longevity and operational efficiency. The paper examines coatings deposited by hollow-cathode-enhanced magnetron sputtering, pulsed laser deposition (PLD), and cathodic arc deposition with laser ignition of carbon plasma and plasma flow separation (CAD-LICPFS) is used to determine structural features, such as crystallinity and the distribution of sp<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> and sp<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> hybridizations. The AFM method allows one to study the surface morphology and evaluate the surface topography of the coatings. The results of the studies show that the deposition method significantly affects the structure and properties of DLC coatings. The obtained data provide valuable insights for optimizing deposition processes to produce high-quality DLC coatings for various industrial applications.