Vectorization Analysis of Voltage Sag Considering on Energy Index

By analyzing the causes and characteristics of various voltage sags, the shortcomings of current description of voltage sags are introduced, and a voltage sags vector considering energy index is proposed. At the equipment level, based on the in-depth analysis of equipment voltage tolerance capacity, an equipment voltage sag severity vector considering energy index is proposed. At the process level, by analyzing the relationship between semiconductor equipment and industrial process, a process voltage sag severity vector based on SEMI F47 curve and considering the sag energy index is proposed. Based on the analysis of process immune time, the concept of process parameter immune time (PIT) is proposed, and process strain vector based on PIT is proposed. The proposed process strain vector can introduce the vector correlation operation into the analysis of industrial process sag consequence state, which has very important practical significance and theoretical value.