Study of the Influence of Substrate Material and Thickness of Indium Tin Oxide Coatings on Their Optoelectronic Characteristics

The article presents the results of studies on the influence of substrate material, application parameters, and Indium Tin Oxide (ITO) coating thickness on its functional characteristics (transparency and surface resistance). Coatings of different thicknesses were applied by magnetron sputtering to two types of substrates: glass and polyethylene terephthalate (PET) film. The optical parameters were studied using spectrophotometry (in the visible wavelength range), while the surface resistance was measured using the four-point van der Pauw method. As a result, the optimal values of the application parameters and ITO coating thickness for each type of substrate were determined, balancing transparency and surface resistance, with a view to their subsequent use as transparent electrodes in microelectronics, optoelectronics, acousto-optics, solar energy, and other fields.