Selective Laser Doping and Dedoping for Phase Engineering in Vanadium Dioxide Film

Vanadium dioxide (VO<sub>2</sub>), renowned for its reversible metal-to-insulator transition (MIT), has been widely used in configurable photonic and electronic devices. Precisely tailoring the MIT of VO<sub>2</sub> on micro-/nano-scale is crucial for miniaturized and integrated devices. However, existing tailoring techniques like scanning probe microscopy, despite their precision, fall short in efficiency and adaptability, particularly on complex or curved surfaces. Herein, this work achieves the local engineering of the phase of VO<sub>2</sub> films in high efficiency by employing laser writing to assist in the hydrogen doping or dedoping process. The laser doping and laser dedoping technique is also highly flexible, enabling the fabrication of reconfigurable, non-volatile, and multifunctional VO<sub>2</sub> devices. This approach establishes a new paradigm for creating reconfigurable micro/nanophotonic and micro/nanoelectronic devices.

Authors

Institutions

Publication Details

Journal
Small Methods
Published
2024-11-28
DOI
https://doi.org/10.1002/smtd.202400832
Citations
1
Primary Topic
Transition Metal Oxide Nanomaterials
Type
article
Field-Weighted Citation Impact
0.17

Funders

Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Selective Laser Doping and Dedoping for Phase Engineering in Vanadium Dioxide Film

Kechao Tang, Run Shi, Jianhua Hao, Ruixuan Peng et al.
1 citations
Small Methods
Transition Metal Oxide Nanomaterials
0.17
article

Selective Laser Doping and Dedoping for Phase Engineering in Vanadium Dioxide Film

Kechao Tang, Run Shi, Jianhua Hao, Ruixuan Peng, Yimao Cai, Yonghuang Wu, He Ma, Linbo Shan, Kai Liu, Yuan Li, Xinping Zhang
article en
1 citations

Abstract

Vanadium dioxide (VO<sub>2</sub>), renowned for its reversible metal-to-insulator transition (MIT), has been widely used in configurable photonic and electronic devices. Precisely tailoring the MIT of VO<sub>2</sub> on micro-/nano-scale is crucial for miniaturized and integrated devices. However, existing tailoring techniques like scanning probe microscopy, despite their precision, fall short in efficiency and adaptability, particularly on complex or curved surfaces. Herein, this work achieves the local engineering of the phase of VO<sub>2</sub> films in high efficiency by employing laser writing to assist in the hydrogen doping or dedoping process. The laser doping and laser dedoping technique is also highly flexible, enabling the fabrication of reconfigurable, non-volatile, and multifunctional VO<sub>2</sub> devices. This approach establishes a new paradigm for creating reconfigurable micro/nanophotonic and micro/nanoelectronic devices.

Small MethodsVol. 9(1)
Peking University (CN), Beijing University of Technology (CN), State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University (CN)
National Natural Science Foundation of China, Natural Science Foundation of Beijing Municipality, National Key Research and Development Program of China
Openalex Percentile: Top 56%
Transition Metal Oxide Nanomaterials
0.17
DOISourceOpenAlex
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.