WM-Graph: Graph-Based Approach for Wafermap Analytics

This paper introduces WM-Graph, a novel approach designed for flexible analytics of wafermaps. The key concept behind WM-Graph is the construction of a wafermap graph, where individual wafermaps are connected if they exhibit semi-equivalence. This graph-based structure allows a wide range of analytics to be performed using established graph algorithms. Unlike traditional multi-class classification methods, WM-Graph enables more versatile analyses, making it possible to answer complex, practical questions that would otherwise be difficult to address. We explain the technical innovations that underpin the WM-Graph approach and demonstrate how to perform certain analytical tasks with simple graph operations. The effectiveness of the WM-Graph approach is validated through experiments using the public WM-811K dataset and a proprietary dataset from a recent production line.