A Novel Demodulation Algorithm Based on the Spatial-Domain Carrier Frequency Fringes Method

Structured illumination microscopy (SIM) has attracted much attention from researchers due to its high accuracy, high efficiency, and strong adaptability. In SIM, demodulation is a key point to recovering three-dimensional topography, which directly affects the accuracy and validity of measurement. The traditional demodulation methods are the phase-shift method and Fourier transform method. The phase-shift method has a high demodulation accuracy, but its time consumption is too long. The Fourier transform method has high efficiency, but its demodulation accuracy is lower due to the loss of high frequency information during the process of filtering. However, in actual measurement, due to the gamma effect of the projector and charge-coupled device (CCD), the phase-shift interval is not strictly equal to the default value, which causes phase-shift error. Therefore, the restored topography contains carrier frequency fringes, which affects the accuracy of the measurement and limits the wide application of SIM. In this paper, a novel demodulation algorithm based on spatial-domain carrier frequency shift is proposed to solve the problem. Through recombining multiple full-period phase-shift images, the error spectrum and the signal spectrum are separated from each other in the frequency domain, so as to eliminate the effect of carrier frequency fringes. Simulations and experiments are carried out to verify the feasibility of the proposed method.