An all-polymer spring optomechanical-microresonator-based ultrasonic sensor

An all-polymer spring optomechanical microresonator based ultrasonic sensor is presented. The microresonator is an all-polymer structure with a micro-disk and a cylindrical waveguide based microcavity. Experiment results show that its sensitivity is 987.8 times that of the commercial acoustic sensor at 200KHz, and its acoustic frequency response range is within 50KHz-400KHz. It shows the advantages of smart structure, high sensitivity, and wideband response, and it is expected to have wide applications in smart grid, biomedicine and medical ultrasound imaging.